Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings.
نویسندگان
چکیده
Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.
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ورودعنوان ژورنال:
- Applied optics
دوره 50 9 شماره
صفحات -
تاریخ انتشار 2011